Implementation of Process Simulation Tools and Temperature Control Methods for Metal Oxide Chemical Vapor Deposition GrowthCX(s) Applied: B3.6Date: 03/12/2010Location(s): Somerset, New JerseyOffice(s): Energy Efficiency and Renewable Energy, National E...
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March 12, 2010
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Implementation of Process Simulation Tools and Temperature Control Methods for Metal Oxide Chemical Vapor Deposition Growth
CX(s) Applied: B3.6
Date: 03/12/2010
Location(s): Somerset, New Jersey
Office(s): Energy Efficiency and Renewable Energy, National Energy Technology Laboratory
CX(s) Applied: B3.6
Date: 03/12/2010
Location(s): Somerset, New Jersey
Office(s): Energy Efficiency and Renewable Energy, National Energy Technology Laboratory
The objective of this multi-faceted two-year program is to develop high-volume epitaxial growth systems that provide a greater than 4-times reduction in high brightness LED (light-emitting diode) per-device cost for epitaxial growth.