On April 21–23, the U.S. Department of Energy’s (DOE’s) Advanced Manufacturing Office (AMO) within the office of Energy Efficiency and Renewable Energy (EERE) held the second in a series of workshops on different topics related to semiconductor research and development (R&D) to increase energy efficiency. This workshop focused on ultra-energy-efficient devices and the ultra-precision manufacturing (UPM) processes and next-generation control and metrology technologies needed to manufacture these devices. In addition to the industry needs and RDD&D opportunities, AMO’s new goal on greenhouse gas (GHG) reduction was addressed. The output of this workshop will inform AMO’s future R&D portfolio investments; provide perspectives on trends, drivers, and challenges for ultra-energy-efficient devices and enabling technologies; and help the stakeholder community understand the opportunities on the horizon