Workshop on Ultra-Precision Control for Ultra-Efficient Devices Workshop Report

On April 21–23, the U.S. Department of Energy’s (DOE’s) Advanced Manufacturing Office (AMO) within the office of Energy Efficiency and Renewable Energy (EERE) held the second in a series of workshops on different topics related to semiconductor research and development (R&D) to increase energy efficiency. This workshop focused on ultra-energy-efficient devices and the ultra-precision manufacturing (UPM) processes and next-generation control and metrology technologies needed to manufacture these devices. In addition to the industry needs and RDD&D opportunities, AMO’s new goal on greenhouse gas (GHG) reduction was addressed. The output of this workshop will inform AMO’s future R&D portfolio investments; provide perspectives on trends, drivers, and challenges for ultra-energy-efficient devices and enabling technologies; and help the stakeholder community understand the opportunities on the horizon