Award Number: DE-EE0009126
CX(s) Applied: A9, B3.6
Advanced Manufacturing Office
Location(s): IA
Office(s): Golden Field Office
The U.S. Department of Energy (DOE) is proposing to provide funding to Iowa State University in Ames, IA (ISU) for the development of new energy efficiency techniques for laser surface drying in microelectronics wafer fabrication.